DuPont PerMx Series is a new version of permanent microlithographic polymer films. PerMx is designed for a variety of applications, including redistribution, bonding and structuring. These films are available in a range of 15-20 micron thicknesses.
Product Benefits:
- High yield and quality through uniform resist thickness across the entire wafer.
- High productivity without need for drying or double coating; no edge bead removal.
- Ability to conform and tent over pre-formed features.
- Low temperature curing
- Low shrinckage and outgassing
PerMX3000 Series is a multi-purpose permanent polymer film with very high resolution, low temperature cure and outstanding mechanical properties. These films are available in 10, 15 and 20 micron thicknesses.