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Removers for LED Fabrication

DuPont EKC Technology offers a specific line of wet chemistries for LED manufacturing,which is growing quickly as we continue to forge new relationships with LED chipmakers on a global scale.

The production of LED dies can require a variety of wet chemical treatments, and DuPont EKC Technology has put its science to work in formulating solutions for the LED industry designed to enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts.


EKC162™ plasma and photoresist residue remover – copper compatible
Formulated to remove the most challenging organic- and plasma-based residues at low operating temperatures. Water-rinsable. Compatible with gallium arsenide (GaAs).

EKC175™ plasma and photoresist residue remover – aluminum compatible
Provides fast and efficient removal of plasma-basedresidues as photoresist. Water-rinsable.

EKC830™ positive tone photoresist remover
Photoresist removal product specifically targeted for positive-tone photoresists. Compatible with anexceptionally broad array of metals.

EKC922™ negative tone photoresist remover
Photoresist removal product specifically targeted for negative-tone photoresists. Compatible with gallium arsenide (GaAs) and an exceptionally broad array of metals.

For additional information on these products, please contact us.

Guidelines for selection of Optimal Cleaning Solutions 

Guidelines for Selection of Optimal Cleaning Solutions 

* Please consult with an EKC engineer about 1) metal compatibility, 2) process condition and 3) tool compatibility.