DuPont EKC Technology offers a specific line of wet chemistries for LED manufacturing,which is growing quickly as we continue to forge new relationships with LED chipmakers on a global scale.
The production of LED dies can require a variety of wet chemical treatments, and DuPont EKC Technology has put its science to work in formulating solutions for the LED industry designed to enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts.
EKC162™ plasma and photoresist residue remover – copper compatible
Formulated to remove the most challenging organic- and plasma-based residues at low operating temperatures. Water-rinsable. Compatible with gallium arsenide (GaAs).
EKC175™ plasma and photoresist residue remover – aluminum compatible
Provides fast and efficient removal of plasma-basedresidues as photoresist. Water-rinsable.
EKC830™ positive tone photoresist remover
Photoresist removal product specifically targeted for positive-tone photoresists. Compatible with anexceptionally broad array of metals.
EKC922™ negative tone photoresist remover
Photoresist removal product specifically targeted for negative-tone photoresists. Compatible with gallium arsenide (GaAs) and an exceptionally broad array of metals.
For additional information on these products, please contact us.
Guidelines for selection of Optimal Cleaning Solutions
* Please consult with an EKC engineer about 1) metal compatibility, 2) process condition and 3) tool compatibility.