For Aggressive Semiconductor Environments
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Since purity is critical to high semiconductor wafer yield, reducing semiconductor seal contamination from particulates, outgassing and extractables is a major goal of semiconductor fabricators. |
By selecting the Kalrez® part that is best suited to a specific application, processors can improve semiconductor seal performance in all wafer-fabricating operations, including thermal, deposition, etching, ashing/stripping, and wet chemical processes.
