Application considerations for perfluoroelastomer seals used on wafer processing equipment (PDF)
Contamination considerations for perfluoroelastomer seals used in deposition processes (PDF)
Outgassing characterization of elastomeric seals used in semiconductor wafer processing (PDF)
Copyright © 2013 DuPont. All rights reserved. The DuPont Oval Logo, DuPont™, The miracles of science™ and all products denoted with ® or ™ are registered trademarks or trademarks of E.I. du Pont de Nemours and Company or its affiliates.