New Improved Permeation-resistant Grade Extends Capabilities for Teflon® PFA HP Plus [.pdf] High purity, broad chemical resistance and excellent mechanicals are retained; permeation is cut by up to 40% for durable, longer lasting fluid handling components.

Wafer Level Chip Scale Packaging [.pdf] Driven by the need for higher density devices and higher speed interconnectivity, the introduction of copper and redistribution layers in these packages created new challenges for the permanent dielectric layer. The solution: HD MicroSystems™ developed a new generation of liquid polyimides, HD-4100, that addressed the unique requirements of WL-CSP applications utilizing copper redistribution layers.

Selecting proper chamber-cleaning processes for installed base CVD tools [.pdf] A case study determines that replacing C3F8 gas with c-C4F8 gas is an inexpensive and easy wayto lower PFC emissions in installed-base CVD chamber-cleaning processes.

Cleaning Gas Conversion Helps Wafer Fabrication Facilities Meet Environmental Goals
and Reduce Costs [.pdf]

The Challenge: Reduction of fab PFC emissions in a cost effective manner without sacrificing clean time. The Solution: Zyron® 8020 (C4F8) chamber cleaning gas reduces PFC emissions of PE-CVD processes using C2F6 or C3F8  by more than 65%, without effecting clean time, and demonstrates substantial cost savings 40-80% savings.

DuPont™ Vespel® Extends the Life of Chamber Liners [.pdf]

The Challenge: Improve longevity of chamber liners for semiconductor and high purity applications. The Solution: DuPont™ Vespel® TP 8005 plasma components specifically designed for endurance, low outgassing and high level of cleanliness.

Long-Life Valve Withstands Corrosive Environments [.pdf]

An all-plastic, high-purity valve with a diaphragm and internal valve body made of DuPont™ Teflon® NXT fluoropolymer resin promotes extended service life in acid and slurry applications.

Fermentation Lab’s New Tubing Cleans Easily, Shows Flow [.pdf]

The fermentation facility producing biological agents for one of the world’s leading biotechnology research and development efforts is relying on tubing and fittings made of DuPont™ Teflon® PFA fluoropolymer resin instead of stainless steel for two key applications.

Teflon® PFA HP Safeguards Purity in Analytical Systems [.pdf]

Upchurch Scientific® meets the need for ultra-high-purity tubing and fittings in the analytical instrument and semiconductor markets with DuPont™ Teflon® PFA HP fluoropolymer.