DuPont Air Products NanoMaterials (DA NanoMaterials) today announced the introduction of DCmP™, a new type of formulation for copper and tungsten chemical mechanical planarization (CMP) slurries. Because less slurry is , required per wafer pass with DCmP™ formulations, the technology enables leading edge applications with a significantly lower cost of ownership for semiconductor fabricators.
The new DCmP™ formulations are proving to be strong performers in the market. Both CoppeReady® Copper and MicroPlanar® Tungsten Slurry products using the new DCmP™ formulations are in full production. Earlier this year, MicroPlanar® Tungsten clearly outperformed competitive products on critical factors of dishing and erosion in a 65-nm customer evaluation.
“DCmP™ formulations answer the cost of ownership needs of our mainstream technology customers, and the performance requirements of the leading edge technology customers. It’s a winning combination,” said Floyd McClung, Chief Executive Officer, DA NanoMaterials. “The formulations are working to accelerate the growth DA NanoMaterials enjoyed during 2004. We are pleased to offer a solid portfolio of CMP products that is proving to be extremely successful in high volume manufacturing at key fabricators worldwide.”
CMP is an enabling technology for sub 0.35um technology nodes in semiconductor fabrication. Planarization becomes increasingly more critical in photolithography as devices decrease in size. In addition to the new DCmP™ formulations, DA NanoMaterials offers high performance products for the following electronic precision polishing applications: STI, ILD, PMD, Ruthenium, Pt, Ir, Si wafer polish, polysilicon. Among those, MicroPlanar® STI, ILD, PMD and Syton® & Mazin® Silicon wafer polish products are in large volume manufacturing in Europe, USA and Asia; Ruthenium CMP Slurry is qualified for production.
DA NanoMaterials was formed in 2000 as a joint venture to combine DuPont’s success in developing and manufacturing colloidal silica sols and particles for electronics applications with Air Product’s extensive manufacturing infrastructure, new product development and global supply of electronic gases and chemicals to the semiconductor industry. The joint venture is headquartered in Tempe, Arizona, where it operates a state-of-the-art applications and formulation laboratory. Customers also have access to the extensive analytical and research capabilities of each parent company.
About Air Products
Air Products (NYSE:APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. With annual revenues of $6.3 billion and operations in over 30 countries, the company's 18,500 employees build lasting relationships with their customers and communities based on understanding, integrity and passion. For more information, visit www.airproducts.com.
DuPont Electronic Technologies is a leading supplier of electronic materials, including materials for the fabrication and packaging of semiconductors, materials for rigid and flexible circuits, and materials for advanced displays. DuPont Electronic Technologies and DA NanoMaterials are also part of DuPont Semiconductor Materials, which connects science and technology from across the company to offer one of the broadest portfolios of innovative materials and advanced process expertise available to semiconductor manufacturers. For more information on DuPont Semiconductor Materials, please visit http://semiconductor.dupont.com
DuPont is a science company. Founded in 1802, DuPont puts science to work by solving problems and creating solutions that make people's lives better, safer and easier. Operating in more than 70 countries, the company offers a wide range of products and services to markets including agriculture, nutrition, electronics, communications, safety and protection, home and construction, transportation and apparel.
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CoppeReady® is a trademark of Air Products, licensed to DA NanoMaterials. MicroPlanar ® is a registered trademark of EKC Technology licensed to DA NanoMaterials, and DCmP™ is a trademark of DuPont Air Products NanoMaterials.