The miracles of science™

Select Industry

Semiconductor Fabrication materials from DuPont

Semiconductor Fabrication Materials


Research Triangle Park, NC, June 15, 2006

DuPont Showcases Semiconductor Fabrication & Packaging Materials

Portfolio Expands with Partnerships in Packaging & Material Advances for Fabricators

Contact: Ellen Pressley
Ellen G.

DuPont today announced it will showcase its expanding portfolio of semiconductor fabrication and advanced packaging materials at SEMICON West 2006 at the Moscone Center in San Francisco, Calif., July 11 - 13, booth #2426, South Hall. By connecting science and technology from across the company, DuPont has established a leading position in the industry with highly engineered materials and advanced process expertise.

"We have a larger, more integrated offering for packaging than ever before," said Peter A. Irvine, global business director, DuPont Semiconductor Packaging & Circuit Materials. "A recent applications development agreement with the renowned Fraunhofer Institute for Reliability and Microintegration IZM, will allow DuPont to integrate materials for wafer level and chip scale packaging much more quickly. Further, the DuPont Advanced Packaging Lithography business has been appointed the U.S. sales representative for Microcontrol Electronic’s line of Leonardo® tape laminator systems, designed for use with DuPont™ MPF microlithographic polymer films. These are both strategic partnerships that compliment and further expand our offerings in semiconductor packaging."

DuPont materials for semiconductor packaging currently include polyimide-based dielectric materials for redistribution, passivation and stress buffering from joint venture HD MicroSystems; Microlithographic Polymer Films composed of temporary and permanent photoimageable dry films for applications such as wafer bumping, backside wafer coating, other wafer level packaging and microelectromechanical systems (MEMS) applications; and from EKC Technology , a comprehensive line of advanced cleaners and residue removers for leading-edge fabrication processes.

"DuPont Semiconductor Fabrication Materials continues to apply science and technology to developing innovative materials on the roadmap for leading fabricators," said T.V. Srinivasan, global business director, DuPont Semiconductor Fabrication Materials. "For example, DuPont™ Zyron® 8020 electronic gas, used as a chamber cleaning gas critical for plasma enhanced chemical vapor deposition equipment, has been shown to help fabricators like Samsung Electronics achieve as much as 60 percent emissions reductions vs. C3F8. It also has been proven to reduce gas usage more than 50 percent, and reduce clean cycle time by 14 percent in production. When we can help fabricators cut costs and emissions, while improving cycle time, we know we have a winning combination."

DuPont Semiconductor Fabrication Materials include resist residue and post CMP cleaners for conventional and copper/low-k integration from DuPont EKC technology; chemical mechanical planarization slurries for wafer polishing from joint venture DuPont Air Products NanoMaterials; liquid polyimides for stress buffer coatings, innerlayer dielectrics and bond pad redistribution applications from joint venture HD Microsystems; Kalrez™ perfluoroelastomer parts and related technologies from DuPont Performance Elastomers; advanced photoresist polymers from DuPont Electronic Polymers; and DuPont™ Vespel® shapes and parts for plasma heat and wear resistance. Teflon® high purity fluoropolymers for fluid handling applications, DuPont™ FE clean agent fire extinguishants, and Zyron® electronic gases from DuPont Fluoroproducts round out the portfolio of offerings for fabricators.

In addition to the products featured, DuPont maintains a leading role in advocating for sustainable growth in the semiconductor industry. Dr. John W. Lott, DuPont global product stewardship lead, will participate in the EHS Interest Group Meeting panel discussing RoHS Enforcement, on July 12, 2006, from 3:00 p.m. – 6:00 p.m., at the San Francisco Marriott Hotel.

For more information, please visit .

DuPont is a science company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in more than 70 countries, DuPont offers a wide range of innovative products and services for markets including agriculture, nutrition, electronics, communications, safety and protection, home and construction, transportation and apparel.

# # #



The DuPont Oval, DuPont™ , The miracles of science™, Kalrez®, Teflon®, Vespel®, and Zyron® are registered trademarks or trademarks of DuPont or its affiliates.

Leonardo® is a registered trademark of Microcontrol Electronic.