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Semiconductor Fabrication materials from DuPont

Semiconductor Fabrication Materials


Danville, CA, July 11, 2007

DuPont Electronic Technologies Formalizes Interconnect Collaboration with IMEC

Semiconductor Post-CMP Solutions and Cu/low k Scaling to be Focus of Materials Development Work

Ellen Pressley

DuPont Electronic Technologies today announced that the company has joined IMEC as an Industrial Affiliate in 45nm and 32 nm technology development programs on cleaning, contamination control and advanced interconnects. During the initial two-year program, EKC Technology, part of DuPont Electronic Technologies, will provide resident technical staff and will be fully engaged with IMEC in developing new post-CMP cleaning solutions for their Cu/low-k scaling program. In addition, EKC will utilize IMEC technology for testing of newly developed post-etch residue removers.

"The need for collaboration in new materials development is well-recognized by the semiconductor industry, and IMEC has consistently demonstrated a proven model for success in this area. We look forward to working closely with the other industrial affiliates to advance and commercialize enabling technologies for advanced interconnects," said Douglas Holmes, director of marketing, EKC Technology – DuPont Electronic Technologies.

"The collaboration with DuPont Electronic Technologies will enable us to evaluate the performance of various EKC post-CMP cleaning solutions. It will also allow us to obtain generic knowledge that can explain phenomena observed during post-CMP cleaning," said Serge Vanhaelemeersch, department director Advanced Materials & Process Steps at IMEC.

EKC Technology is part of DuPont Electronic Technologies, a leading supplier of electronic materials, including materials for the fabrication and packaging of semiconductors, materials for hybrid, rigid and flexible circuits, and materials for advanced displays. For more information, please visit For further information on IMEC, please visit IMEC.

DuPont is a science-based products and services company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in more than 70 countries, DuPont offers a wide range of innovative products and services for markets including agriculture and food; building and construction; communications; and transportation.

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