DuPont Air Products NanoMaterials L.L.C. Launches New Tunable Barrier Slurry for Advanced Technology Nodes
DuPont Air Products NanoMaterials L.L.C. (DA NanoMaterials), a 50/50 joint venture of DuPont and Air Products, today launched a non selective chemical mechanical planarization (CMP) barrier slurry with tunable copper, barrier and dielectric polishing rates for use with advanced technology nodes. CMP utilizes mechanical and chemical means in the removal of various dielectric and metal layers used in the integrated circuit (IC) manufacturing process.
CMP Slurries are comprised of very fine abrasive particles dispersed in water along with chemical additives. They are used to polish surfaces of electronic substrates and devices to smooth finishes. DA NanoMaterials' newest slurry offering will be marketed under the CoppeReady® Cu6545 trademark*, joining other slurries the joint venture markets under its MicroPlanar®, Syton® and Mazin® trademarks.
DA NanoMaterials’ CoppeReady® Cu6545 barrier series slurry has the capability to be customized for desired performance by modulating selectivities, Cu:Black Diamond** (BD) dielectric selectivities can be tuned from 0-1. Extensive testing performed on 200 mm and 300 mm wafers shows the slurry has the capability to control copper polishing rates from less than 100 Å/min to 600 Å/min, TaN polishing rates greater than 600 Å/min and independently control BD I and BD II dielectric polishing rates from less than 100 Å/min to greater than 800 Å/min. The CoppeReady® CU6545 series is currently being qualified at 45 nm.
"The CoppeReady® Cu6545 barrier slurry is a family of products designed to provide tailored solutions to our customers for advanced technologies, both for logic and memory applications," said Edward Shober, Chief Executive Officer for DA NanoMaterials. "The slurry utilizes highly engineered abrasives and unique chemistries that offer enhanced capabilities to optimize selectivities and provide superior defect performance, while delivering a cost effective solution."
DuPont Air Products NanoMaterials L.L.C. is a joint venture between DuPont (Electronic Technologies) and Air Products and does not release its financial results. It was formed in 2000 and was expanded in April 2004 with the addition of the DuPont EKC Technology CMP slurry business, and Air Products’ addition of the CMP slurry business from the former Ashland Electronic Chemicals Division, which it acquired in 2003. The company operates a state-of-the art applications and formulation laboratory at its headquarters in Tempe, Arizona. It manufactures products in Asia, Europe and North America to service the global semiconductor and wafer polishing markets. Additional information on the company can be obtained from its website – www.nanoslurry.com
About Air Products
Air Products (NYSE:APD) serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment and is listed in the Dow Jones Sustainability and FTSE4Good Indices. The company has annual revenues of $9 billion, operations in over 40 countries, and over 20,000 employees around the globe. For more information, visit www.airproducts.com.
DuPont Electronic Technologies is a leading supplier of electronic materials, including materials for the fabrication and packaging of semiconductors, materials for hybrid, rigid and flexible circuits, and materials for advanced displays. For more information, please visit electronics.dupont.com.
DuPont is a science-based products and services company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in more than 70 countries, DuPont offers a wide range of innovative products and services for markets including agriculture and food; building and construction; communications; and transportation.
*CoppeReady is a registered trademark of Air Products and Chemicals, Inc.
**Black Diamond is a trademark of Applied Materials, Inc.
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Air Products: Rob Brown, tel: (610) 481-1192, e-mail: firstname.lastname@example.org
DuPont Electronic Technologies: Ellen Pressley, tel: (919) 248-5598, e-mail: email@example.com