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Semiconductor Fabrication materials from DuPont

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TAIPEI, Taiwan, September 9, 2008

DA NANOMATERIALS UNVEILS INNOVATIVE COPPER SLURRY FOR NEXT GENERATION TECHNOLOGIES

Today at SEMICON® Taiwan, DuPont Air Products NanoMaterials L.L.C. [DA NanoMaterials], a 50/50 joint venture of DuPont and Air Products, unveiled CoppeReady® Cu3988, an innovative copper CMP slurry with enhanced polishing capabilities for advanced technology nodes. DA NanoMaterials continues to provide truly innovative products that deliver superior performance reliably with reduced total cost of ownership. 

DA NanoMaterials’ CoppeReady® Cu3988 copper series slurry was developed to improve copper dishing, erosion and over-polish window, targeting 45nm and 32nm technology nodes. The product contains a particle with an optimized zeta potential which has the capability to increase suspension stability and eliminate particle aggregation. This slurry is designed with low solids concentration [<1%] resulting in excellent defect performance.  Additionally, a dual inhibitor system provides superior dishing performance and tunable polish rates to meet customer-specific process requirements. By utilizing different dilutions and eliminating the need for pad cleaning chemicals, Cu3988 meets challenging cost of ownership targets for current and future technology nodes.   

“CoppeReady® Cu3988 is a superior product designed to provide an engineered solution to our customers. The product enables high copper removal rates at low pressures, excellent topography performance, industry leading defectivity and an improved total cost of ownership,” said Edward Shober, Chief Executive Officer for DA NanoMaterials. “This new offering is an extension of an already successful copper product portfolio used in production at a number of major global customers.”

CMP utilizes mechanical and chemical means in the removal of various dielectric and metal layers used in the integrated circuit [IC] manufacturing process. CMP slurries are comprised of very fine abrasive particles dispersed in water with chemical additives. They are used to polish surfaces of electronic substrates and devices to smooth finishes.

DA NanoMaterials markets its CMP slurries under the CoppeReady®, MicroPlanar®, Syton® and Mazin™ trademarks.

 

About DA NanoMaterials
Established in 2000, DA NanoMaterials L.L.C. is a joint venture between DuPont [Electronic Technologies] and Air Products. The company operates a state-of-the-art applications and formulation laboratory at its headquarters in Tempe, Arizona. It manufactures products in Asia, Europe and North America to service the global semiconductor and wafer polishing markets. Additional information on the company can be obtained from its website – www.nanoslurry.com.

 

About Air Products
Air Products [NYSE:APD] serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. The company has annual revenues of $10 billion, operations in over 40 countries, and over 22,000 employees around the globe. For more information, visit www.airproducts.com.

 

About DuPont
DuPont Electronic Technologies is a leading supplier of electronic materials, including materials for the fabrication and packaging of semiconductors, materials for hybrid, rigid and flexible circuits, and materials for advanced displays. For more information, please visit www.electronics.dupont.com.

DuPont is a science-based products and services company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in more than 70 countries, DuPont offers a wide range of innovative products and services for markets including agriculture and food; building and construction; communications; and transportation.

CoppeReady® is a registered trademark of Air Products, licensed to DA NanoMaterials L.L.C.

MicroPlanar®, Syton® and Mazin™ are registered trademarks or trademarks of EKC, licensed to DA NanoMaterials L.L.C.

 

Media Inquiries:
Air Products:  Rob Brown: 610. 481.1192; brownrf@airproducts.com

DuPont Electronic Technologies:  Ellen Pressley: 919.248.5598; Ellen.g.pressley@usa.dupont.com