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Semiconductor Fabrication Materials

Semiconductor manufacturing involves aggressive chemicals and gases. To ensure safety and purity requirements, DuPont offers a broad range of materials to improve the manufacturing equipment performance.

Our materials include:

Gaskets, seals, o-rings, elastomers and resins Pipe, tubing, hose, flanges, connectors, couplings and plumbing fittings Raw materials for custom components

 

Gaskets, Seals, O-rings, Elastomers and Resins We provide field-proven materials for the manufacture of semiconductors, where processing steps can involve extremes of both thermal and chemical exposure. Since purity is critical to high semiconductor wafer yield, reducing contamination caused by seal deterioration is a major goal of semiconductor fabricators. We offer a variety of materials that provide reduced contamination and longer life in aggressive wafer manufacturing environments.

Kalrez® perfluoroelastomer parts from DuPont Performance Elastomers Chemical resistance that is nearly universal, coupled with superior high-temperature properties, enables Kalrez® parts to withstand virtually any process media, including plasma with various gases at temperatures up to 327°C (620°F).
Viton® fluoroelastomer parts from DuPont Performance Elastomers The most specified fluoroelastomer, well known for its excellent (400°F/200°C) heat resistance. Viton® offers excellent resistance to aggressive fuels and chemicals and has worldwide ISO 9000 registration.

 

Pipe, Tubing, Hose, Flanges, Connectors, Couplings and Plumbing Fittings Semiconductor manufacturing involves aggressive chemicals and gases. To ensure safety and purity requirements, DuPont offers a broad range of materials for fluid handling components, vessel and container linings, tools, equipment and systems that come in contact with aggressively reactive, high-purity fluids.

DuPont™ Teflon® coatings Combining heat resistance with almost total chemical inertness, excellent dielectric stability, and a low coefficient of friction, Teflon® industrial coatings offer a balance of properties unbeatable by any other material.
DuPont™ Teflon® resins The mechanical toughness, electrical, and low-friction properties of Teflon® make it the preferred plastic for a host of applications and different processing techniques.
DuPont™ Tefzel® Tefzel® films can be thermoformed, laminated, heat-sealed, die-stamped, and oriented for use in a wide variety of applications including composite part mold release, anti-corrosive linings, non-stick roll covers, rupture disks, high frequency microwave circuitry and more.

 

Raw Materials and Custom Components DuPont has a vast array of raw materials for custom parts for equipment makers, fabs and moulders.

Kalrez® perfluoroelastomer parts from DuPont Performace Elastomers Available in standard or specialty types that have been formulated to optimize properties and give the best performance in specific applications.
DuPont™ Vespel® parts and shapes DuPont™ Vespel® Parts and Shapes come with a documented record of reliability and durability in wafer handling, wafer processing, IC handling and testing, and other semiconductor manufacturing operations.
DuPont™ Teflon® fluoropolymer resins Products made with Teflon® fluoropolymer resins have exceptional resistance to high temperatures, chemical reaction, corrosion, and stress-cracking.
DuPont™ Tefzel® films Tefzel® films can be thermoformed, laminated, heat-sealed, die-stamped, and oriented for use in a wide variety of applications including composite part mold release, anti-corrosive linings, non-stick roll covers, rupture disks, high frequency microwave circuitry, and more.