Cleanroom Apparel & Wipes DuPont offers a wide range of proven, science-based solutions for protecting products and people in a sterile environment. Our products include:

Cleanroom Protective Apparel DuPont Cleanroom garments are lightweight, strong and durable and can be readily sterilized to eliminate cross-contamination.
DuPont™ Sontara® micro-level cleaning fabrics DuPont™ Sontara® micro-level cleaning fabrics are application-engineered for today's cleanrooms, where it's critically important to minimize particulate contaminants and additives.

Cleaning Solutions & Solvents
DuPont™ Vertrel® specialty fluids DuPont™ Vertrel® specialty fluids are a family of hydrofluorocarbon-based solvents with zero ozone depletion and low global warming potential, ideal for use in vapor degreasing equipment for cleaning, rinsing, drying, and carrier-fluid applications.

Device & Wafer Handling Systems Automated wafer handling systems require contact surfaces that are resilient, long wearing, free of particulate and dimensionally stable. We offer the following products for use in a variety of applications.

DuPont™ Vespel® parts and shapes DuPont™ Vespel® polyimide parts come with a documented record of reliability and durability in wafer handling, wafer processing, IC handling and testing, and other semiconductor manufacturing operations. As an alternative to ceramics, quartz and unproven types of plastics, Vespel® parts reduce ownership costs with longer life in the chamber and extended maintenance intervals.

Lubricating Oils and GreasesDuPont™ Krytox® has a strong history of delivering performance to the semiconductor industry.

• Krytox® vacuum pump fluids Are distilled to provide low vapor pressures and are available with anticorrosion additives that give extra protection for metal parts and bearing surfaces. Krytox® nonflammable vacuum pump fluids eliminate the chance of fire in pumps and can be used in applications where conventional vacuum pump oils cause safety problems.



• DuPont™ Krytox® electronic grade greases Offer excellent lubrication in all aspects of vacuum pump operation for production line equipment: bearings, valves, seals, o-rings, and other sensitive components. Krytox® is the product of choice for applications where complete nonflammability and oxygen compatibility are required. Krytox® lubricants provide superior performance, and can extend the life of vacuum pump components.

Laboratory apparatus & supplies Semiconductor manufacturing requires aggressive chemicals that will be used in testing in the laboratory before commercial production. DuPont offers a variety of products for labware applications.

DuPont™ Teflon® Resins Components of Teflon® PFA HP and Teflon® PFA HP Plus are fabricated with efficient, versatile thermoplastic melt extrusion, and injection, transfer, and rotational molding. The components are used in the semiconductor industry for transport and handling of aggressive, ultrapure fluids. Applications include piping, fittings, valves, wafer carriers, linings for storage tanks and vessels, sinks for wet benches, fluid containers, and labware.