In virtually every process step, DuPont semiconductor fabrication materials can help improve wafer yeild, reduce environmental emissions and enable customers to move beyond technical hurdles.
Below is an overview of DuPont materials offered throughout the semiconductor fabrication process.
Removers & Cleaners
Leading solutions for the removal of photoresists, post-CMP contamination and post-dry-etch process residue.
» Find out more about Removers & Cleaners used in: [ Planarization | Lithography | Etch & Clean ] |
|
Liquid polyimides
High-purity liquid polyimides and PBO coatings specifically engineered for microelectronic applications.
» Find out more about Liquid polyimides used in: [ Lithography | BEOL & WLP ] |
|
Electronic Polymers
High quality, innovative polymers for KrF and ArF photoresist formulations, as well as anti-reflective coating formulations.
» Find out more about Electronic polymers used in: [ Lithography ] |
|
Slurries
Differentiated products for CMP applications and silicon wafer polishing.
» Find out more about Slurries used in: [ Planarization ] |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
