DuPont in the Semicon Manufacturing Industry
Teflon® PTFE and Teflon® PFA, fully fluorinated polymers
Teflon® PTFE and Teflon® PFA are fully fluorinated polymers. They were adopted for use in the earliest stages of semiconductor research, and then manufacturing, for their outstanding chemical resistance and purity.
Teflon® PTFE and Teflon® PFA, broad and excellent chemical resistance
One of the key properties relied upon in Semiconductor manufacturing applications is the excellent chemical resistance of fully fluorinated fluoropolymers.
Teflon® PFA HP Plus, PFA HP, and PTFE resist the most aggressive organic and inorganic chemicals and solvents, over a wide temperature range, with inertness even for combinations of aggressively reactive chemicals at high temperatures.
The Semicon industry values this very broad chemical resistance because it allows flexible tool use with many chemicals and mixtures of chemicals.
Manufactured from Teflon®, tools and systems are readily adopted for use with the new chemicals associated with the advancing semiconductor manufacturing technology.
The first fluoropolymer was discovered by the DuPont research chemist, Dr. Roy Plunkett, in 1938. Roy was studying improvements in refrigerant gases, and found that tetrafluoroethylene (TFE), would polymerize. The resulting polytetrafluoroethylene (PTFE) polymer was found to have a long list of unusual properties, including:
- low coefficient of friction
- heat resistance
- unique electrical properties
- cryogenic stability
- chemical resistance
Most of its properties are unique, such as its ability to be used from cryogenic temperatures up to very high temperatures, its electrical properties, and its broad chemical resistance.