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High-Purity Chemical Manufacturing

High-purity chemicals and solvents used in the semiconductor industry are manufactured using equipment that resists corrosion and leaching that can introduce contaminates. It is often more cost effective to make products that are inherently pure rather than trying to achieve high purity through refining steps. To guard purity, the chemical process industry (CPI) uses the same types of corrosion-resistant fluid handling components as the semiconductor industry.

Process Vessels

Vessels and columns for reactions, distillations, absorptions and other processes can be made of steel or reinforced plastic lined with Teflon® PFA HP or Teflon® PTFE. Such linings are used in the CPI because they extend service life and reduce maintenance, and they have the added benefit of protecting product purity.



Pipe and Fittings

Steel or reinforced plastic pipe is lined with with Teflon® PFA HP or Teflon® PTFE is used for transporting ultrapure fluids. Lined fittings are used to complete piping systems. Connections are made with bolted flanges, or by melt bonding with Teflon® PFA HP. To reduce the number of flanged fittings in a system, piping is bent to the required configuration after lining.



Tubing

Tubing of Teflon® PFA HP is used instead of lined pipe for transporting chemicals when its smaller diameter is sufficient.



Valves and Pumps

A wide range of valves, pumps and other fluid handling components are available with linings of Teflon® PFA HP or Teflon® PTFE. Like lined pipe, these components are used in the CPI to extend service life and reduce maintenance, and they have the added benefit of protecting product purity.



Storage Containers

Linings of Teflon® PFA HP or Teflon® PTFE are used in steel and reinforced plastic tanks to help protect the purity of stored materials.



Transport Containers

Containers for shipping high-purity chemicals and solvents are lined with Teflon® PFA HP to protect their purity. Such containers are reusable, since the lining is unaffected by contact with virtually all chemicals.



Filters

Filters with media of Teflon® PTFE are used to remove particulate from high-purity chemicals and solvents. These filters are similar to those used in semiconductor manufacturing processes but may have higher capacity.



Sensors

To help prevent contamination, capacitive-type sensors shielded in dip tubes of high-purity Teflon® PFA HP monitor fluid levels in tanks. Other designs can sense through linings of tanks or pipe made from Teflon® PFA HP. Connecting cables are jacketed with Teflon® PFA for additional protection against contamination.