The miracles of science™

Select Industry
DuPont™ Vertrel® Home
Products
Uses & Applications
Carrier Fluid Oxygen Service Cleaning Cleaning Solvent (Fluorinated) Particulate / Ionic Removal Light Soil Removal Heavy Soil Removal Medical Devices / Silicone Deposition and Tube Swelling Defluxing Precision Cleaning Optics FOUP Cleaning Drying / Rinsing Agent Aerosol Heat Transfer Fluid Brine / Coolant High-Voltage Applications (Dielectrics) Testing / Analytical Fluid Dry Cleaning Fluid Case Studies
Industries
Technical Info
Events
CONTACT US
Printer Friendly Version
DuPont Products & Services
DuPont Brands & Trademarks

FOUP Cleaning

FOUP is an acronym for Front Open Unified Pod. FOUPs are used to hold silicon wafers securely and safely in a controlled environment, and are made of specialized plastics.

The FOUP must be extremely clean so that they do not contaminate the silicon chips that are placed in them. The main challenge is cleaning a FOUP is to maintain a high level of cleanliness required without using a solvent so aggressive that it damages the FOUP.

DuPont™ Vertrel® and its alcohol azeotropes maintain this fine balance and are able to give the desired cleaning and drying performance without reacting with the plastic material.

Please contact us  for further details on the selection of the ideal DuPont™ Vertrel® product for your FOUP cleaning process.

Recommended Products
DuPont™ Vertrel® XE
DuPont™ Vertrel® XM
DuPont™ Vertrel® XP