Translucent polyimide parts designed specifically for semiconductor and high-purity applications. Plasma etch chamber components made with Vespel® TP-8005 have excellent erosion resistance. Parts are either thermoformed or injection molded for excellent geometric versatility.
Transparent polyimide parts for semiconductor applications such as:
- Etch chamber domes
- Etch chamber liners
- Test fixtures
Benefits
- Excellent plasma erosion resistance
- Temperature resistance up to 462°F
- High elongation
- Good electrical properties
- Economical large and thick parts
- Excellent geometric versatility — thermoformed and injection-molded
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