DuPont™ Vespel® parts and shapes reduce ownership costs with longer life in the chamber and extended maintenance intervals. And they often cost less right up front.
DuPont™ Vespel® parts and shapes come with a documented record of reliability and durability in wafer handling, wafer processing, IC handling and testing and other semiconductor manufacturing operations.
Etch and Clean
In chamber solutions, DuPont™ Vespel® offers polymer parts that possess high mechanical performance in the most severe chamber conditions. The particular wear performance and ultra clean nature of the polymer allows longer life time of wafer contact parts and contamination free operation processes in the Etching area.
Utilizing newly developed polymer grades, Vespel® offers a number of great chemical resistance materials that allow excellent wear performance to the retaining ring solutions, providing customers with longer part life and remarkable cost of ownership reduction.
Wafer Handling and End Effectors - The non scratching, ultra low wear performance has made DuPont™ Vespel® a favorite choice of wafer contact material. With newly developed conductive grade, Vespel® offers great solutions to ESD change reduction. Also, a ultra high modulus composite product line offers low deflection wafer handling effectors with vibration damping effect.